Sylabus
microelectronics processing
- 046238
Lecture
Tutorial
Project/
Seminar
Laboratory
Weekly
Hours
2
4
Credit
Points
3.0
Prerequisites:
semiconductor devices
044126
or
basics of semiconductor devices
044127
Overlapping Courses:
microelectronics processing
044239
Photolithography, wet and dry thermal oxidation of silicon, wet and dry,
etching, diffusion, CVD. Ion implantation, evaporation and sputtering of thin films.
Characterization methods for the processes. Microfabrication of various devices.
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Created in 21/05/2013 Time 12:25:44
